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Title: Engineering: Cornell Quarterly, Vol.12, No.4 (December 1978): The New Submicron Facility
Authors: Ballantyne, Joseph M.
Frey, Jeffrey
Buhrman, Robert A.
Batterman, Boris W.
Lee, Charles A.
Rhodin, Thor N.
Keywords: Engineering
Cornell University
Submicron Structures
Electrical Engineering
Integrated Circuits
Superconductor Microelectronics
X-Ray Lithography
Ion Implantation
Applied and Engineering Physics
Issue Date: 1978
Publisher: Internet-First University Press
Abstract: IN THIS ISSUE: The Electronics Revolution and the Potential of the New Submicron Facility at Cornell /2 (Cornell's role as host institution for the National Research and Resource Facility for Submicron Structures is discussed by Joseph M. Ballantyne, professor of electrical engineering and acting director of the facility.) ... Integrated Circuits: The Expanding Technology of Shrinking Structures /12 (How advances in integrated circuit technology result in lower prices is explained by Jeffrey Frey, associate professor of electrical engineering.) ... Superconductor Microelectronics: Key to a New Class of Computers /17 (The potential of the Josephson junction and the use of submicron fabrication technology in research on "weak-link" microelectronic devices are discussed by Robert A. Buhrman, assistant professor of applied and engineering physics.) ... X-Ray Lithography and Microscopy for Submicron Structures /21 (Boris W. Batterman, director of the School of Applied and Engineering Physics, writes about x-ray techniques for the production and examination of submicron structures, and the unique source of x-radiation that Cornell will have.) ... Introducing Impurity: Ion Implantation and its Role in Microelectronics /27 (Electrical Engineering Professor Charles A. Lee discusses an important technique for the fabrication of integrated circuit components.) ... A Submicron View of Surfaces and Interfaces /32 (Thor N. Rhodin, professor of applied and engineering physics, looks at some of the equipment to be available in the submicron facility, and how it can be used for the microanalytical characterization of electronic devices and materials.) ... Register /41 ... Faculty Publications /47
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