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Please use this identifier to cite or link to this item: http://hdl.handle.net/1813/2425
Title: Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies
Authors: Everhart, Thomas E.
Krusius, J. Peter
Frey, Jeffrey
Wolf, Edward D.
Adesida, Ilesanmi
Eastman, Lester F.
Sonek, Gregory J.
Ballantyne, Joseph M.
Buhrman, Robert A.
Keywords: Engineering
Cornell University
Submicrons
Microstructures
Materials Science
Electrons, Ions, and Photons
Nanolithography
Microphysics
Issue Date: 1983
Publisher: Internet-First University Press
Abstract: IN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7 J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49
URI: http://hdl.handle.net/1813/2425
Appears in Collections:Engineering Quarterly

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