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| Title: | Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies |
| Authors: | Everhart, Thomas E.
Krusius, J. Peter
Frey, Jeffrey
Wolf, Edward D.
Adesida, Ilesanmi
Eastman, Lester F.
Sonek, Gregory J.
Ballantyne, Joseph M.
Buhrman, Robert A. |
| Keywords: | Engineering
Cornell University
Submicrons
Microstructures
Materials Science
Electrons, Ions, and Photons
Nanolithography
Microphysics |
| Issue Date: | 1983 |
| Publisher: | Internet-First University Press |
| Abstract: | IN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7
J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49 |
| URI: | http://hdl.handle.net/1813/2425 |
| Appears in Collections: | Engineering Quarterly
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