Engineering: Cornell Quarterly, Vol.18, No.3 (Spring 1983-84): Key to New Technologies
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IN THIS ISSUE: Submicron Structures: A Microcosm of Modern Engineering /2 Thomas E. Everhart ... Ultrasmall Features: Key to the Future Development of VLSI Technology /7 J. Peter Krusius ... Small-Scale Physics for Large-Scale Electronic Circuits /12 Jeffrey Frey ... Dry Processing: New Techniques for Etching Submicrometer Structures /16 Edward D. Wolf and Ilesanmi Adesida ... New Techniques for Growing Compound Semiconductors /20 Lester F. Eastman ... Microfabrication for Guided Wave Optics /28 Gregory J. Sonek and Joseph M. Ballantyne ... Superconductors in Microstructures /32 Robert A. Buhrman ... Multidisciplinary Research: Key to Progress at NRRFSS /37 ... Register /41 ... Faculty Publications /49
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1983
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Internet-First University Press
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Engineering; Cornell University; Submicrons; Microstructures; Materials Science; Electrons, Ions, and Photons; Nanolithography; Microphysics
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periodical