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http://hdl.handle.net/1813/9123
| Title: | Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues |
| Authors: | Resnick, S. Samorodnitsky, G. Xue, F. |
| Keywords: | Operations Research Industrial Engineering technical report |
| Issue Date: | May-1999 |
| Publisher: | Cornell University Operations Research and Industrial Engineering |
| Citation: | 1241 |
| Abstract: | Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues |
| URI: | http://hdl.handle.net/1813/9123 |
| Appears in Collections: | ORIE Technical Reports
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