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Please use this identifier to cite or link to this item: http://hdl.handle.net/1813/9123
Title: Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues
Authors: Resnick, S.
Samorodnitsky, G.
Xue, F.
Keywords: Operations Research
Industrial Engineering
technical report
Issue Date: May-1999
Publisher: Cornell University Operations Research and Industrial Engineering
Citation: 1241
Abstract: Randomness and dependence in etch process and their effects on predictability of failures and on cycle times $infty$> input fluid queues
URI: http://hdl.handle.net/1813/9123
Appears in Collections:ORIE Technical Reports

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